DEVICE AND METHOD FOR MICRO-BARRELING AND POLISHING LIQUID

摘要

PROBLEM TO BE SOLVED: To develop a new technique which can smoothen a surface or an edge of a small workpiece having a complicated shape in a short time at low cost. SOLUTION: A micro-barreling device 10 is constructed of a barrel 20 which has the workpiece W disposed therein and is supplied with polishing liquid L, and an ultrasonic wave radiating device 30 having a horn 32 connected to a transducer 31 connected to a high-frequency oscillator. The workpiece W disposed inside the barrel 20 is disposed in the polishing liquid L supplied into the barrel 20. The horn 32 has a flat leading end face facing the workpiece W disposed inside the barrel 20 in the polishing liquid L. The distance between the leading end face of the horn 32 and the workpiece W facing the leading end face of the horn 32 in the polishing liquid L inside the barrel 20 is adjusted to within 1/5 wavelength of an ultrasonic wave oscillated by the transducer 31 by driving the high-frequency oscillator.