发明名称 ENERGY-CONFINEMENT TYPE VIBRATOR FOR PIEZOELECTRIC VIBRATION GYRO AND VIBRATION GYRO
摘要 PROBLEM TO BE SOLVED: To provide a vibrator for a piezoelectric vibration gyro that has an excellent energy confinement function and little dispersion in piezoelectric characteristic, and can be easily manufactured. SOLUTION: In the piezoelectric vibrator having a structure that a square piezoelectric rectangular plate 2 is subjected to polarization treatment in the thickness thereof, the periphery of the center portion of one principal surface is subjected to a grinding treatment to form a square convex step portion 2' which is linearly symmetrical with respect to one symmetrical axis line. An electrode pattern having a shape which is linearly symmetrical with respect to one symmetry axis line is formed at the center portion corresponding to the step portion 2' on the other principal surface. The electrode pattern contains a driving partial electrode 3 and a pair of detecting partial electrodes 4, 5 which are spaced from each other at a predetermined interval, and the external connection electrodes 3', 4', 5' acting as the connecting portions from the partial electrodes 3, 4, 5 to the external are drawn to extend to the peripheral edge sides different from one another on the other principal surface.
申请公布号 JP2003139537(A) 申请公布日期 2003.05.14
申请号 JP20010337384 申请日期 2001.11.02
申请人 NEC TOKIN CORP;WATANABE HIROSHI 发明人 TAKAHASHI MASAHIKO;ABE HIROSHI;ISHIKAWA HISAHIRO;WATANABE HIROSHI
分类号 G01P9/04;G01C19/56;H01L41/08 主分类号 G01P9/04
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