发明名称 METHOD FOR STICKING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To prevent occurrence of defects due to dust, etc., caused in sticking. SOLUTION: In a method for sticking substrates together in which an upper glass substrate 3 and a lower glass substrate 4 disposed opposite to each other are stuck together via an adhesive, both the substrates are aligned by moving the lower glass substrate 4 relatively to the upper glass substrate 3 in a horizontal direction and then both the substrates are stuck together via the adhesive.
申请公布号 JP2003137616(A) 申请公布日期 2003.05.14
申请号 JP20010379327 申请日期 2001.11.06
申请人 SHIBAURA MECHATRONICS CORP 发明人 OGIMOTO SHINICHI
分类号 G02F1/1339;C03C27/10;(IPC1-7):C03C27/10;G02F1/133 主分类号 G02F1/1339
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