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发明名称
METHOD FOR SUPPLYING GAS TO A CHAMBER AND METHOD FOR REGULATING THE CONTENT OF A GIVEN ELEMENT IN THE ATMOSPHERE OF SUCH A CHAMBER
摘要
申请公布号
EP0920362(B1)
申请公布日期
2003.05.14
申请号
EP19970952088
申请日期
1997.12.17
申请人
L'AIR LIQUIDE, S.A. A DIRECTOIRE ET CONSEIL DE SURVEILLANCE POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
发明人
LETURMY, MARC;PIOGER, FREDERIC
分类号
B23K31/02;B23K1/008;G05D11/13;(IPC1-7):B23K1/008
主分类号
B23K31/02
代理机构
代理人
主权项
地址
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