| 摘要 |
PURPOSE: An inorganic film evaporation apparatus is provided to be capable of preventing deterioration of an organic display. CONSTITUTION: An electronic beam source(67) is installed at a lower part in a vacuum chamber(61) and emits an electronic beam. A target container(66) is installed at the surrounding of the electronic beam source and contains an evaporation target for an inorganic film. A substrate support(63) is installed at an upper part and supports a substrate which is entered in the chamber and where a predetermined organic film is stacked. An interception pole(91) is installed between the target container and the substrate support, is placed at a height where it is not collided with the electronic beam, has an open part formed at a position corresponding to a position where the electronic beam is collided with the evaporation target, and consists of a material through which an X-ray is not penetrated.
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