| 摘要 |
PROBLEM TO BE SOLVED: To suppress fluctuation of operation voltage characteristic of ON voltage, OFF voltage or the like in an electrostatic actuator, and to prevent phenomena where even if the rated voltage is applied to the electrostatic actuator, the electrostatic actuator is not powered ON, or even if a driving voltage is powered OFF, the electrostatic actuator is not powered OFF. SOLUTION: A fixed electrode 30 and a movable electrode 38 are disposed to face each other. An insulating film 31 is formed on a surface of the fixed electrode 30. The insulating film 31 contains nitride film (SiN) 37 as a main material. On both of front and back side surfaces of the nitride film 37, oxidized films (SiO2 ) 39, 48 are formed. A plurality of protrusions 32 are arranged on an upper surface of the insulating film 31 in the regions facing the movable electrode 38. An amount of electrical charge in the insulating film 31 is mainly determined by thickness of the oxidized film 48. The nitride film 47 is used for ensuring the thickness of the film required for withstand voltage characteristic or the like.
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