SEALING STRUCTURE FOR CYLINDER BODY, DEVICE PROVIDED WITH IT, OPTICAL ELEMENT HOLDING STRUCTURE, AND EXPOSURE DEVICE

摘要

PROBLEM TO BE SOLVED: To surely seal a part between contact parts of annular members constituting a cylinder body. SOLUTION: With respect to a sealing structure for a cylinder body formed by bringing end faces in the axial direction of a first annular member 4 and a second annular member 5 into contact with each other, slopes 4a and 5a oppositely inclined to the axial direction are formed in the outer peripheries of contact parts of both annular members, and an annular elastic member 12 is brought into contact with both slopes. A first annular pressing member 13 having an inner peripheral surface 13a which is inclined in the axial direction so as to approximately face the slope of the second annular member and is brought into contact with the elastic member and a second annular pressing member 14 having an inner peripheral surface 14a which is inclined in the axial direction so as to approximately face the slope of the first annular member and is brought into contact with the elastic member are arranged on the outer peripheral side of the elastic member, and a displacement giving means 15 is provided which displaces the first and second pressing members to relatively approximate them to each other in the axial direction.