| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectrophotometer of high accuracy and high reliability not requiring the positional adjustment between optical parts or the like and an adjusting mechanism, capable of being miniaturized simply and capable of being manufactured as one chip by utilizing a semiconductor technique. SOLUTION: The spectrophotometer is equipped with a light waveguide 2 formed by removing an Si substrate 1 by etching, the light incident slit 3 formed to the stepped end surface of the Si substrate of the light waveguide, the diffraction lattice 4 formed to the end surface of the light waveguide opposed to the light incident slit and the photodiode array 5 formed on the end surface side of the light waveguide to which the light incident slit is formed so that a part of the Si substrate becomes a light detection part. The light incident slit, the center of the diffraction lattice and the light detection surfaces of the individual photodiodes constituting the photodiode array are arranged on a Rowland circle to constitute the spectrophotometer.
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