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发明名称
VAPOR PHASE GROWTH APPARATUS
摘要
申请公布号
EP0837495(B1)
申请公布日期
2003.05.14
申请号
EP19970907358
申请日期
1997.03.18
申请人
NIPPON SANSO CORPORATION
发明人
ARAI, TAKAYUKI;HIDAKA, JUNICHI;MATSUMOTO, KOH;AKUTSU, NAKAO;AOYAMA, KAZUHIRO;INAISHI, YOSHIAKI;WAKI, ICHITARO
分类号
C23C16/44;C23C16/455;C30B25/02;C30B25/14;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
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地址
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