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发明名称
Planar-type magnetron sputtering apparatus
摘要
申请公布号
EP1120811(A3)
申请公布日期
2003.05.14
申请号
EP20010300564
申请日期
2001.01.23
申请人
HAN, JEON-GEON;NAM, KYUNG-HOON;MUSIL, JINDRICH
发明人
HAN, JEON-GEON;NAM, KYUNG-HOON;MUSIL, JINDRICH
分类号
C23C14/35;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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