摘要 |
To advantageously eliminate the disadvantage of attenuation of the radiant light from dielectric barrier discharge lamps by a UV transmission component, a treatment device (10) using dielectric barrier discharge lamps (20a,20b,20c) is provided with a lamp chamber (R) in which dielectric barrier discharge lamps (20a,20b,20c) are located and in which there is an inert gas atmosphere; a treatment chamber (T), in which an article (1) to be treated is located, is provided with a treatment gas atmosphere, and a UV transmission component (11) by which the lamp chamber (R) and the treatment chamber (T) are separated from one another. In each of the lamp chamber (R) and the treatment chamber (T) there are devices (40,41) for determining the gas pressure within the respective chamber, a supply arrangement (24a,32a) for delivering gas to the inside the respective chamber and an arrangement (24b,32b) for discharging gas from the respective chamber. A control device (42) regulates the pressure of the gas atmosphere within the lamp chamber (R) and the pressure of the gas atmosphere of the treatment chamber (T) relative to one another by determining the gas pressures of the lamp chamber (R) and the treatment chamber (T). <IMAGE> |