| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation device capable of mounting a plurality of dry vacuum pumps while reducing an installation space of an auxiliary pump, reducing the maintenance cost, and improving the energy saving effect of an evacuation system. SOLUTION: Discharge sides of a plurality of dry vacuum pumps 20A-20C arranged in parallel are arranged to perform evacuation in common by one auxiliary pump 30, and pipes 12A-12C respectively communicating the discharge side of each of the dry vacuum pumps 20A-20C with the auxiliary pump 30 are provided with switch valves 40A-40C for communicating and cutting them. A control device 33 controls the switching of the switch valves 40A-40C and the operation of the auxiliary pump 30 on the basis of the outputs from intake pressure sensors 34A-34C of the dry vacuum pumps, a discharge pressure sensor 35, and driving current sensors 36A-36C.
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