| 摘要 |
PROBLEM TO BE SOLVED: To provide a function device which can suppress upsizing in spite of formation of multichannels, and makes a cost lower and the reliability of optical communication better, a method of manufacturing the same and a driving circuit. SOLUTION: The function device is provided with a driving circuit substrate 2 and is provided with a Miller substrate 1 so as to laminate on the driving circuit substrate 2. The Miller substrate 1 is provided with, for example, nine pieces of Miller elements 11 which are arrayed ni a matrix form of (3 rows×3 columns). The miller elements 11 are manufactured by a micro-electro- mechanical system (MEMS). The driving circuit substrate 2 is provided with an insulative substrate and the surface of this substrate is provided with a driving circuit for driving the Miller elements 11. The driving circuit substrate 2 is joined to the Miller substrate 1 across a resin layer 3 consisting of a thermosetting adhesive.
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