发明名称 METHOD AND DEVICE FOR INSPECTING DEFECT
摘要 PROBLEM TO BE SOLVED: To speedily carry out inspections on a plurality of inspection items for the surface condition of an object to be inspected. SOLUTION: Every time a group of inspection stations comprising a plurality of inspection means and a plurality of jigs to supply an object to be inspected to each inspection means and to position it are indexed, an inspection by each inspection means is successively carried out. Thereby, a plurality of inspections can be simultaneously carried out.
申请公布号 JP2003139717(A) 申请公布日期 2003.05.14
申请号 JP20010331913 申请日期 2001.10.30
申请人 CANON INC 发明人 TSURUOKA SHINSUKE
分类号 G01B11/30;G01B21/30;G01N21/952;G03G21/00;(IPC1-7):G01N21/952 主分类号 G01B11/30
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