摘要 |
PROBLEM TO BE SOLVED: To provide a small pressure detecting device having high sensitivity that can constantly accurately detect external pressure for a long time. SOLUTION: In a package for the pressure detecting device, a first metallized electrode 7 for forming electrostatic capacity is installed on one principle surface of a ceramic basic substance 1 of which a semiconductor element 3 is mounted on the other principle surface and a second metallized electrode 9 for forming electrostatic capacity facing to this first metallized electrode 7 is installed on the inside principle surface. Also a ceramic plate 2 having a metallized layer 11 for reinforcing on a full surface inside of 0.05-0.5 mm from the outer circumference edge of the outside principle surface is joined with a flexible state to form a closed space between the ceramic base substance 1 and the ceramic plate 2. Thereby the progress of a crack generated on the circumference of the ceramic plate 2 can be prevented by the metallized layer 11 for reinforcing and therewith electric insulation between the second metallized electrode 9 and the metallized layer 11 for reinforcing can be maintained.
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