发明名称 Polished polymide substrate
摘要 Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
申请公布号 US6563998(B1) 申请公布日期 2003.05.13
申请号 US19990292432 申请日期 1999.04.15
申请人 FARAH JOHN;SUDARSHANAM VENKATAPURAM S. 发明人 FARAH JOHN;SUDARSHANAM VENKATAPURAM S.
分类号 G02B6/12;G02B6/138;G02B6/30;G02B6/36;(IPC1-7):G02B6/10 主分类号 G02B6/12
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