发明名称 |
Test and burn-in apparatus, in-line system using the test and burn-in apparatus, and test method using the in-line system |
摘要 |
An apparatus for testing semiconductor devices allows various testing processes, including a burn-in process, to be performed at the same testing stage. Test trays which contain the semiconductor devices are used throughout an in-line system so that an entire back-end process can be performed without loading/unloading the semiconductor devices between the various tests. The in-line system includes multiple test and burn-in apparatuses as well as a single sorting unit which performs a composite sorting operation after all the testing processes. A method for testing semiconductor devices in the in-line system includes testing the semiconductor devices in the test trays using the test and burn-in apparatus, transferring the test trays to a different testing apparatus for a second testing, and finally sorting the semiconductor devices after all testing processes have been performed based on a final sorting map created by combining test tray maps generated during each of the tests.
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申请公布号 |
US6563331(B1) |
申请公布日期 |
2003.05.13 |
申请号 |
US20010935143 |
申请日期 |
2001.08.21 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
MAENG JU SEOK |
分类号 |
G01R31/26;G01R1/04;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/26 |
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地址 |
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