发明名称 Semiconductor device having multilayer passivation layer formed over memory cell fuse area
摘要 A semiconductor device of the present invention is provided with a first metal wire formed above a semiconductor substrate with an interlayer insulating film intervened, a fuse formed on interlayer insulating film so as to be spaced at a distance away from first metal wire, an insulating film which covers first metal wire and which has an opening above fuse, a second metal wire formed on insulating film, a first passivation film which covers second metal wire and fuse, and a second passivation film formed on first passivation film, made of a material different from that of first passivation film and having an opening above fuse.
申请公布号 US6563188(B2) 申请公布日期 2003.05.13
申请号 US20020140953 申请日期 2002.05.09
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORPORATION 发明人 NAGATANI HIROYUKI
分类号 H01L21/3205;H01L21/82;H01L21/8242;H01L23/52;H01L23/525;H01L27/108;(IPC1-7):H01L29/00 主分类号 H01L21/3205
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