| 摘要 |
FIELD: mechanical engineering; electronic, electrical and medical industries. SUBSTANCE: proposed plant includes vacuum chamber, at least two magnetron sprayers, gas evacuation, supply and flow rate control system, unit for motion of tape made in form of revolving platform which is closed at the top and is provided with guide rollers, detachable drums, autonomous drives and braking units and shield closing break in tape generatrix; vacuum chamber is provided with at least one port fitted with cover which is hermetically articulated with chamber; located diametrically on cover are magnetron sprayers ; cover is partially rotatable relative to vacuum chamber around axial line which is orthogonal relative to plane of cover and surface of tape; each magnetron sprayer is hermetically articulated with cover; provision is made for adjustable motion of sprayer relative to cover along its own axial line; rollers and drums are extensible. EFFECT: extended functional capabilities due to adaptation of equipment and optimization of coat forming procedure. 3 dwg, 3 ex
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