| 摘要 |
PURPOSE: To prevent ionized amine from flowing into ultra pure water in a process for producing the ultra pure water used for a manufacturing process of a semiconductor integrated circuit apparatus. CONSTITUTION: A plurality of capillary tube-line hollow fiber membranes TYM are formed of a polysulfone film, and a polyimide film or the like are arranged in a case KOT, both end sections of the plurality of hollow fiber membranes are bonded by thermal solvent welding. Further, a UF module that is composed by also bonding the hollow fiber membrane TYM to the base by the thermal solvent welding is arranged in a UF apparatus, and such a UF apparatus is arranged in an ultra pure manufacturing system.
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