APPARATUS AND METHOD FOR INFORMATION PROCESSING, COMPUTER-READABLE MEMORY, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a method for making the productivity of a semiconductor manufacturing apparatus improved by diagnosing the performance of an apparatus. SOLUTION: A control command input from a operation terminal 101 is transferred to a control object unit 103 for driving the apparatus. At the same time, the control command is transferred to a unit operation simulation section 113 for executing simulation. The apparatus state of the control object unit 103 and the unit operation simulating section 113 are compared in an actual operation/simulation operation comparison section 121 and diagnosis of the failure is conducted at failure/preventing diagnosis section 123, after subjecting it to statistical processing at a apparatus state trend 122.