FERROELECTRIC SUBSTANCE ELEMENT AS WELL AS ACTUATOR, INK JET HEAD AND INK JET RECORDING DEVICE EMPLOYING THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain a ferroelectric substance element capable of contriving the improvement of the insulating property, reliability and resistance to pressure of a ferroelectric substance film. SOLUTION: The ferroelectric substance element is provided with a common electrode 11, a ferroelectric substance functional film 10 formed on the common electrode 11 and an individual electrode 3 formed on the ferroelectric substance functional film 10 while the ferroelectric substance functional film 10 is constituted of a ferroelectric substance film 10a and an insulation reinforced film 10b including at least one kind of the constituting elements of the ferroelectric substance film 10a.