CONTROL EQUIPMENT, TEMPERATURE CONTROLLER, AND HEAT TREATMENT SYSTEM

摘要

PROBLEM TO BE SOLVED: To enable feedback control to perform only by setup a set of control parameters when the feedback control to two inputs is performed, and furthermore to enable the highly precise control while excelling in quick response. SOLUTION: In a PID controller 7 which controls the temperature of a control object 2, on the one hand a high frequency part 11 with large gain at high frequency is constituted by a proportional circuit 8 and a differential circuit 10. On the other hand, a low frequency part 12 with large gain at low frequency is constituted by a integral circuit 9. The PID controller feeds back the first detected temperature PV1 fast in response to the high frequency part 11. On the other hand, it feeds back the second detected temperature PV2 slow in response to the low frequency part 12.