System for the distribution of hydrogen on an ion implantation device using a glass tube feed arrangement with glass-metal connections and an outer electrically insulating plastic tube

摘要

System for the distribution of a gas, notably of hydrogen in an ion implantation device with an ionization chamber connected to a very high voltage source with a shroud enclosing it, has insulated channel for gas assuring the transition between the shroud and the very high voltage zone of the implantation device is a glass tube incorporating glass-metal connectors for connecting its ends to the gas feed channels and to the flexible gas pipe connected to the source of ions. This glass tube is encased in an electrically insulating plastic tube which connects the shroud to the very high voltage zone.