发明名称 DIRECTION DETECTION ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a direction detection element capable of being miniaturized and thinned down and accurately detecting the direction of incident light, and a manufacturing method therefor. SOLUTION: Four rectangular contact pads 201-204 are respectively arranged on four PIN photodiodes formed on a substrate. Among the contact pads 201-204, four walls 301-304 radially extended at an angle of 90 degrees to each other with a reference point P as a center are provided. A recess 10 is formed along one side of the walls 301-304 and a groove 11 is formed along the other side and the side around an end part. Rectangular light receiving areas 101-104 of the PIN photodiodes are respectively formed so as to be adjacent through the recess 10 to one side of the walls 301-304. By curving the walls 101-104 along the recess 10, the walls 101-104 are vertically erected.</p>
申请公布号 JP2003133583(A) 申请公布日期 2003.05.09
申请号 JP20010331274 申请日期 2001.10.29
申请人 ADVANCED TELECOMMUNICATION RESEARCH INSTITUTE INTERNATIONAL 发明人 PABLO BACCALO;KUBOTA KAZUYOSHI;AIDA TADAHITO
分类号 G01C1/00;G01B11/26;H01L27/14;H01L31/10;H01L31/16;(IPC1-7):H01L31/16 主分类号 G01C1/00
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