| 摘要 |
PROBLEM TO BE SOLVED: To realize a three-dimensional quadrupole mass spectrometer by which its start-up time can be reduced, and the optimal condition for separation in the mass separation device and the optimal condition in a mass spectrometer can be set simultaneously to analize with high sensitivity and high accuracy. SOLUTION: In a 3DQ section 11, a ventilating hole 5 and a control valve 6 for changing opening condition of the ventilating hole 5 are arranged, and by fully opening the control valve 6 at a starting in the device, a degree of vacuum needed for an analysis is quickly attained and the start-up time in the device can be reduced. Furthermore, even though a carrier gas flow rate and the introducing amount of reactive gas are increased, by controlling the opening and closing condition of the control valve 6, the inside of the 3DQ section 11 can be always kept in the optimal degree of vacuum for an analysis. And so the optimal condition for separation in the mass separation device and the optimal condition in a mass spectrometer can be set simultaneously. Hereby, since a component of analysis object can be introduced and detected in a trap within a short time while increasing a carrier gas flow rate, it is possible to deal with the highly sensitive analysis of a trace amount of the component.
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