ELECTRODE STRUCTURE FOR INJECTING CARRIER INTO POROUS SILICON DIAPHRAGM AND FABRICATING METHOD THEREOF

摘要

PURPOSE: An electrode structure for injecting carriers into a porous silicon diaphragm is provided to fabricate a light emitting device using porous silicon and a sensor device like an optical sensor or a humidity sensor by forming an anode and a cathode of a horizontal structure in which electrons and holes can be simultaneously injected into the porous silicon diaphragm. CONSTITUTION: Aluminum(4) is deposited on the back surface of a silicon substrate for an ohmic contact. Porous silicon(1) is formed in a concave groove of an oxide layer silicon substrate(5). N+ electrode(2) and p+ electrode(3) are formed in the concave groove of the porous silicon. The porous silicon diaphragm as a metal electrode is formed in the upper roughness of the n+ and p+ electrodes and in the roughness of the oxide layer silicon substrate.