发明名称 APPARATUS FOR CLAMPING TEST TRAY OF SEMICONDUCTOR DEVICE TEST HANDLER
摘要 PURPOSE: An apparatus for clamping a test tray of a semiconductor device test handler is provided to prevent a coupling error between a tray moving device and a test tray generated by an alignment error of a test tray during a test since the test tray is accurately positioned at the assigned position when the test is implemented by one step at the side of the test tray. CONSTITUTION: An apparatus for clamping a test tray of a semiconductor device test handler includes a preheating chamber for heating or cooling the semiconductor devices installed at the test tray at a predetermined temperature, a test chamber(72) for implementing the test installed at one side of the preheating chamber by connecting the semiconductor devices moved from the preheating chamber to the test socket, a defrosting chamber installed at one side of the test chamber for recovering the semiconductor devices of the test tray moved from the test chamber, a guide rail installed in such a way that the guide rail(77) traverse the preheating chamber, the test chamber and the defrosting chamber and a pair of moving devices for horizontally moving the test tray along the guide rail(77).
申请公布号 KR20030034454(A) 申请公布日期 2003.05.09
申请号 KR20010065404 申请日期 2001.10.23
申请人 MIRAE CORPORATION 发明人 HAM, CHEOL HO;HWANG, UI SEONG
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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