发明名称 |
APPARATUS FOR CLAMPING TEST TRAY OF SEMICONDUCTOR DEVICE TEST HANDLER |
摘要 |
PURPOSE: An apparatus for clamping a test tray of a semiconductor device test handler is provided to prevent a coupling error between a tray moving device and a test tray generated by an alignment error of a test tray during a test since the test tray is accurately positioned at the assigned position when the test is implemented by one step at the side of the test tray. CONSTITUTION: An apparatus for clamping a test tray of a semiconductor device test handler includes a preheating chamber for heating or cooling the semiconductor devices installed at the test tray at a predetermined temperature, a test chamber(72) for implementing the test installed at one side of the preheating chamber by connecting the semiconductor devices moved from the preheating chamber to the test socket, a defrosting chamber installed at one side of the test chamber for recovering the semiconductor devices of the test tray moved from the test chamber, a guide rail installed in such a way that the guide rail(77) traverse the preheating chamber, the test chamber and the defrosting chamber and a pair of moving devices for horizontally moving the test tray along the guide rail(77). |
申请公布号 |
KR20030034454(A) |
申请公布日期 |
2003.05.09 |
申请号 |
KR20010065404 |
申请日期 |
2001.10.23 |
申请人 |
MIRAE CORPORATION |
发明人 |
HAM, CHEOL HO;HWANG, UI SEONG |
分类号 |
G01R31/26;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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