| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical device capable of producing a high degree of polarization, easily switching a plane of polarization, and easily performing high precision measurement using a compact and inexpensive light source of nonlinear polarization. SOLUTION: The optical device for measuring the polarization dependent characteristic of an object to be measured has a light source for radiating a beam of nonlinear polarization of an extreme ultraviolet region or an X ray region, and a rotatable polarizer composed of a group of mirrors which reflect three times or more, and are disposed such that the beam radiated from the light source is sequentially reflected and the optical axis of an incident beam and that of an outgoing beam are on the same line.</p> |
