| 摘要 |
PROBLEM TO BE SOLVED: To obtain a glass ceramic substrate of high reliability wherein dimensional precision is high, and deterioration of insulating properties of a glass ceramic coating layer is not present by surely restraining baking shrinkage of a glass ceramic green sheet. SOLUTION: This method consists of a process for forming a glass ceramic green sheet laminate 1 and forming the glass ceramic coating layer 3 of 0.015 mm to 0.1 mm in thickness after baking on a conductor pattern 2 surface on the laminate, a process for laminating a restrictive green sheet containing inorganic material hard to be sintered and glass interposing an adhesive agent layer containing glass and solvent on both surfaces of the laminate 1, a process for eliminating organic component from the laminate 1 and forming the glass ceramic substrate holding the restrictive sheet by baking, and a process for eliminating the restrictive sheet from the substrate. Glass content of the adhesive agent layer bonds the restrictive green sheet to the glass ceramic green sheet in the case of baking, and is eliminated together with the restrictive sheet from the glass ceramic substrate after baking. |
