Scanning electron microscope Wien filter having support structure around openings with magnetic field generated and electromagnetic field radially extending parts generated and outer magnetic circuit.

摘要

The electromagnetic filter has a structure generating a field around a partial passage (C). A support structure (E) around the passage provides a number of openings (4). Permeable magnetic fields are generated around the openings. Elements (16) generate an electromagnetic field connected to radially extending parts (14). There is a magnetic circuit around the support structure engaging and coupling the extended parts.