PLASMA DEVICE

摘要

PURPOSE: A plasma device is provided to emit easily the heat of an RF feedthrough to the outside and minimize a variation of the impedance due to the heat by using the bar-shaped RF feedthrough. CONSTITUTION: An upper portion of a plasma chamber is formed with a quartz dome(110) having a gas injection portion and a gas exhaust portion. A bellja(130) is used for covering the quartz dome(110). The inside of the bellja(130) is formed with a dome shaped. The outside of the bellja(130) is formed with a cylindrical shape. A bellja heater(135) is installed at the bellja(130). A plasma electrode(120) is installed between the bellja(130) and the quartz dome(110). An RF feedthrough(150) is contacted with a vertex of the plasma electrode(120). The RF feedthrough(150) is formed with a shape of bar. A cooling jacket(160) is installed around the RF feedthrough(150). A cooling line(165) is installed in the cooling jacket(160). An air cooling jacket(170) is installed at an upper portion of the cooling jacket(160). A fan(175) is installed at the air cooling jacket(170).