摘要 |
PURPOSE: An integrated circuit, a fluid injector, a print head, an ink-jet print cartridge, a slot feed print head, a manufacturing method of a multilayer integrated circuit and a separation restricting method of a cavitation layer are provided to prevent the delamination of the cavitation layer by minimizing interaction between layers during manufacturing process with the shielding element. CONSTITUTION: An integrated circuit(100) includes a gate oxide layer(118), a polycrystalline silicon or poly gate electrode layer(119), a dielectric layer(120), a resisting/ conducting layer(124), a conductive layer(126), a passivation layer(128), a cavitation layer(132), a fluid barrier layer(136), an orifice plate(140), an ejection chamber(144), and a firing element(148). The fluid barrier layer forms the integral layer including the orifice plate. The integrated circuit comprises a shielding element and a charge dissipating element connecting the gate electrode layer to ground. The shielding element comprises the dielectric layer disposed on a low conductance semiconductor region and the gate electrode layer disposed on the gate oxide layer, and electrically separates a first doped silicon region from a second doped silicon region.
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