发明名称 INTEGRATED CIRCUIT, FLUID INJECTOR, PRINT HEAD, INK-JET PRINT CARTRIDGE, SLOT FEED PRINT HEAD, AND METHOD FOR MANUFACTURING MULTILAYER INTEGRATED CIRCUIT AND RESTRICTING DELAMINATION OF CAVITATION LAYER
摘要 PURPOSE: An integrated circuit, a fluid injector, a print head, an ink-jet print cartridge, a slot feed print head, a manufacturing method of a multilayer integrated circuit and a separation restricting method of a cavitation layer are provided to prevent the delamination of the cavitation layer by minimizing interaction between layers during manufacturing process with the shielding element. CONSTITUTION: An integrated circuit(100) includes a gate oxide layer(118), a polycrystalline silicon or poly gate electrode layer(119), a dielectric layer(120), a resisting/ conducting layer(124), a conductive layer(126), a passivation layer(128), a cavitation layer(132), a fluid barrier layer(136), an orifice plate(140), an ejection chamber(144), and a firing element(148). The fluid barrier layer forms the integral layer including the orifice plate. The integrated circuit comprises a shielding element and a charge dissipating element connecting the gate electrode layer to ground. The shielding element comprises the dielectric layer disposed on a low conductance semiconductor region and the gate electrode layer disposed on the gate oxide layer, and electrically separates a first doped silicon region from a second doped silicon region.
申请公布号 KR20030035950(A) 申请公布日期 2003.05.09
申请号 KR20020065410 申请日期 2002.10.25
申请人 HEWLETT-PACKARD COMPANY 发明人 DODD SIMON;BRYANT FRANK RANDOLPH;MIKULAN PAUL I.
分类号 B41J2/16;B41J2/045;B41J2/14;H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):B41J2/045 主分类号 B41J2/16
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