发明名称 DICING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dicing device requiring no daily cleaning of an oil pan and causing no lowering an operating rate by preventing fragments, processing chips or the like of a work from being deposited on the oil pan receiving waste water of grinding water. SOLUTION: In order to prevent processing chips D produced by grinding processing on the oil pan 30 provided on the processing part 20 of the dicing device 10 performing trenching of the work W and grinding processing such as cutting by a rotary blade 21 from being deposited on the bottom face of the oil pan 30, a wiper 70 moved by coming into contact with the bottom face of the oil pan 30 or a processing chip discharge means comprising a belt conveyor 80 is provided. Since the processing ships D are discharged without being deposited on the bottom face of the oil pan 30 by the processing chip discharge means, the daily cleaning of the oil pan 30 is not needed, and the operating rate of the dicing device 10 is improved.
申请公布号 JP2003133259(A) 申请公布日期 2003.05.09
申请号 JP20010329434 申请日期 2001.10.26
申请人 TOKYO SEIMITSU CO LTD 发明人 SAKATANI YASUYUKI;FUKUOKA KAZUYA;HIRUTA TOMOAKI;ASANO TAKAYUKI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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