| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for charging a substrate which can obtain predetermined uniform or nearly uniform charged state of a substrate. SOLUTION: The apparatus for charging the substrate comprising a dielectric substrate (4), a support member (17) having a first end (23) and a second end (24) between which the member extends substantially parallel to the substrate, a row of electrodes (18) distributed over the support member between the first and second ends, the electrodes extending from the support member in the direction of the substrate, the electrodes having a free end (25) for spraying charge on the substrate, each free end having a mainly substantially fixed distance from the substrate, wherein the distance in the case of a first electrode (d1 ) differs substantially from the distance in the case of a second electrode (d2 ).
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