| 摘要 |
PURPOSE: A tunnel effect transmitter is provided to achieve a flat emitter that has high-energy current density that is also able to operate reliably in low vacuum environments. CONSTITUTION: A tunnel effect transmitter comprises an emitter, an electron supply(10), a tunneling layer(20) disposed on the electron supply, a cathode layer(14) disposed on the tunnel layer, and a conduction layer disposed partially on the cathode layer and defining an opening to create an emission area. A method for creating an emitter on an electron supply(10) comprises a steps of applying a tunneling layer(20) on an electron source, a step of applying a cathode layer(14) on the tunneling layer, a step of applying a variable density photoresist layer over the cathode layer, a step of developing the variable density photoresist layer to create a re-entrant profile of the etched openings exposing a portion of the cathode layer, and a step of applying a conductive layer within the developed openings on the cathode layer.
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