摘要 |
PROBLEM TO BE SOLVED: To cause a piezoelectric stator to move a slider in one direction, by causing a drive unit to apply a trapezoidal wave to a piezoelectric element provided with a slip stopper. SOLUTION: The piezoelectric element 1, formed in the shape of flat plate or thin film, is provided with a surface electrode 2 and a back electrode 3, and a bonding portion 82 of at least one slip stopper 8 is bonded to the surface electrode 2. The piezoelectric elements 1 are fixed on a base 4, so that the piezoelectric elements are identical in the direction of stretching. The surface electrode 2 and the back electrode 3 of each piezoelectric element 1 are supplied with voltage in the form of trapezoidal wave from a drive unit 12. Due to all the piezoelectric elements 1 being expanded and contracted, the non-bonding portions 83 of the slip stoppers 8 apply frictional force with respect to the slider 21 in the one direction. By having an insulating film 17 bonded to the surface electrode 2 or the back electrode 3, even if a plurality of the piezoelectric elements 1 overlap, the drive unit 12 is capable of individually supplying voltage with respect to each piezoelectric element 1. |