| 摘要 |
PROBLEM TO BE SOLVED: To provide the lid engaging mechanism of a substrate container, which is capable of locking a container main body and a lid firmly together even when the substrate container is increased in size, restraining the lid from being opened due to drop impact, and preventing a clean room from being contaminated by the debris of a precise substrate. SOLUTION: This lid engaging mechanism is provided to a substrate container equipped with a lid having a dual structure composed of an outer and an inner part. The engaging mechanism is composed of a disk-shaped rotary plate 22 which is provided inside the lid in a rotatable manner and can be rotated from outside the surface of the lid, a connection plate 23 which is engaged with the rotary plate 22 and made to slide by the rotation of the rotary plate 22, a clamp 25 whose one end protrudes from or retreats into a hole bored in the peripheral edge of the lid when the connection plate 23 slides, and an engaging part which is rotatably supported on the other end of the clamp 25 and fitted into an engaging recess. The engaging part is so formed as to be brought into area contact with the engaging recess provided to the container main body. |
