THIN-FILM PEELING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin-film peeling apparatus having good workability and being able to improve quality. SOLUTION: A guide roller 35 born on the inner peripheral surface 11A of a peeling roller 11 is arranged, these guide rollers 35 are coupled to lead screws 32 through guide roller plates 36 and stages 34. By actuating motors 31 to rotate lead screws 32, guide rollers 35 rotate in linking with them to rotate and move the peeling roller 11. The peeling roller 11 steadily pushes and presses a substrate receiving downward pressing force of the guide rollers 35. A film securing roller 61 having a circular section and excentric rotating axis is secured to the peeling roller 11 by a supporting plate 63 through a torsion coil spring 62. The film securing roller 61 steadily sandwiches a film between it and the peeling roller 11 receiving the rotating force of the torsion coil spring 62.