THIN FILM FORMER

摘要

PROBLEM TO BE SOLVED: To form a thin film in the state in which damages due to dust and abnormal plasma are suppressed. SOLUTION: A plasma confinement cylinder 113 that confines the scatter region of the ECR plasma delivered from a plasma formation chamber 102 is provided below the bottom of a target 105 (container 105a). The cylinder is made from a nonmagnetic material such as quartz or alumina. The cylinder 113 confines the scattering of a plasma stream delivered from the chamber 102 and passed through the region of the target 105 and confines the irradiation region of the plasma stream in the surface defined by the surface of a sample mount 104 within the region on the sample mount 104.