| 摘要 |
The invention concerns a micromechanical component comprising a substrate (17) whereon is deposited a micromechanical functional layer (15) made of a first material. The invention is characterized in that the functional layer (15) includes first and second zones (15a, 15c) which are linked by a third zone (15b; 220a,b; 320a,b; 420a-d; 520; 520a-h) made of a second material (20). At least one of the zones (15a or 15b; 220a,b; 320a,b; 420a-d; 520; 520a-h or 15c) forms part of a mobile structure (32) which is suspended above the substrate (17). The invention also concerns a method for producing such a micromechanical component. |
