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发明名称
VERBESSERTE KLEINMASSIGE WAFERHALEEINRICHTUNG
摘要
申请公布号
DE69813014(D1)
申请公布日期
2003.05.08
申请号
DE19986013014
申请日期
1998.11.02
申请人
ASM AMERICA INC., PHOENIX
发明人
GOODMAN, G.;RAAIJMAKERS, IVO;JACOBS, R.;VAN BILSEN, B.;MEYER, J.;BARRETT, ALAN
分类号
H01L21/683;C23C16/458;C23C16/48;H01L21/205;H01L21/26;H01L21/687;(IPC1-7):H01L21/00
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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