| 摘要 |
A method for producing a multi-layer, micro-mechanical device. The device comprises an internal cavity having a micro-mechanical component therein. The method comprises the steps of forming the micro-mechanical component from a layer of first material, providing a sealing layer on at least one surface of the first material to define the cavity, providing a getter material within the cavity, sealing the first material to the sealing layers by anodic bonding, supplying an inert gas to the cavity to regulate the pressure inside the cavity. A corresponding device produced by the method is also disclosed.
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