发明名称 Self-aligned hybrid deposition
摘要 A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer having a second area of coverage that is different from the first area of coverage.
申请公布号 US2003087471(A1) 申请公布日期 2003.05.08
申请号 US20020233482 申请日期 2002.09.04
申请人 SHTEIN MAX;FORREST STEPHEN R 发明人 SHTEIN MAX;FORREST STEPHEN R.
分类号 C23C14/04;C23C14/12;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):H01L21/00 主分类号 C23C14/04
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