发明名称 |
Self-aligned hybrid deposition |
摘要 |
A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results in the second layer having a second area of coverage that is different from the first area of coverage.
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申请公布号 |
US2003087471(A1) |
申请公布日期 |
2003.05.08 |
申请号 |
US20020233482 |
申请日期 |
2002.09.04 |
申请人 |
SHTEIN MAX;FORREST STEPHEN R |
发明人 |
SHTEIN MAX;FORREST STEPHEN R. |
分类号 |
C23C14/04;C23C14/12;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):H01L21/00 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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