发明名称 IMPROVED MICROWAVE STRIPLINE APPLICATORS
摘要 <p>An apparatus and method which maintains plasma discharges (25) in containers (24) which have an internal section of 1 cm or less in width are described. The very small cross-section plasma discharges are useful in MEMS devices, in spectrometers and in spectroscopy.</p>
申请公布号 WO2003039214(A1) 申请公布日期 2003.05.08
申请号 US2002034065 申请日期 2002.10.25
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