发明名称 Apparatus and method for diamond production
摘要 An apparatus for producing diamond in a deposition chamber including a heat-sinking holder for holding a diamond and for making thermal contact with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, a noncontact temperature measurement device positioned to measure temperature of the diamond across the growth surface of the diamond and a main process controller for receiving a temperature measurement from the noncontact temperature measurement device and controlling temperature of the growth surface such that all temperature gradients across the growth surface are less than 20° C. The method for producing diamond includes positioning diamond in a holder such that a thermal contact is made with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, measuring temperature of the growth surface of the diamond to generate temperature measurements, controlling temperature of the growth surface based upon the temperature measurements, and growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface, wherein a growth rate of the diamond is greater than 1 micrometer per hour.
申请公布号 US2003084839(A1) 申请公布日期 2003.05.08
申请号 US20020288499 申请日期 2002.11.06
申请人 HEMLEY RUSSELL J.;MAO HO-KWANG;YAN CHIH-SHIUE;VOHRA YOGESH K. 发明人 HEMLEY RUSSELL J.;MAO HO-KWANG;YAN CHIH-SHIUE;VOHRA YOGESH K.
分类号 C30B29/04;C01B31/06;C23C16/27;C30B25/10;C30B25/16;(IPC1-7):C30B28/12;C30B28/14 主分类号 C30B29/04
代理机构 代理人
主权项
地址