OPTICAL DEFLECTOR AND ITS MANUFACTURING METHOD, OPTICAL EQUIPMENT USING THE SAME, AND TORSION OSCILLATING MEMBER

摘要

PROBLEM TO BE SOLVED: To solve the problem that a conventional optical deflector becomes deficient in rigidity when moment of inertia is to be reduced and is then unable to sufficiently suppress dynamic deflection. SOLUTION: An optical deflector which is characterized in that both ends of a movable plate 6 are supported on a support substrate 2 by an elastic support part 3 and a reflecting surface 4 is formed on one surface of the movable plate 6 and deflects light incident on the reflecting surface 4 by oscillating the movable plate 6 around the axis of torsion of the elastic support part 3 as a center has recessed parts 5B and 5C formed on at least one of both the surfaces of the movable plate 6 on both the sides across the axis of torsion of the elastic support part 3 and on the opposite side from the reflecting surface 4.