发明名称 SEMICONDUCTOR STRUCTURE WITH A COIL UNDERNEATH THE FIRST WIRING LAYER OR BETWEEN TWO WIRING LAYERS
摘要 A semiconductor structure comprising a component layer made of a semiconductor material , a dielectric layer (12) arranged above the component layer (2), a wiring layer (14) arranged on the dielectric layer (12) and a coil (60) which is arranged in the dielectric layer (12) and which is connected to contacts (66,68) in the wiring layer (14).
申请公布号 WO03038899(A2) 申请公布日期 2003.05.08
申请号 WO2002EP11756 申请日期 2002.10.21
申请人 INFINEON TECHNOLOGIES AG;GOLLER, KLAUS 发明人 GOLLER, KLAUS
分类号 H01L21/02;H01L23/522;H01L27/08 主分类号 H01L21/02
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