发明名称 CONFIGURATION MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a configuration measurement device which improves the accuracy of measurement while it makes contact force smaller and expands the width of a measuring object. SOLUTION: The configuration measurement device includes a gravimeter, a gauge head at the upper part of a gravimeter, a means to change the distance of the vertical direction between the gravimeter and the gauge head, a means to measure the variation of the distance of the vertical direction of the gravimeter and the gauge head, a means to change the horizontal distance of the gauge head and the measuring object and a means to measure the variation of the horizontal distance of the gauge head and the measuring object.
申请公布号 JP2003130604(A) 申请公布日期 2003.05.08
申请号 JP20010330767 申请日期 2001.10.29
申请人 CANON INC 发明人 KANEKO TADASHI
分类号 G01B5/20;(IPC1-7):G01B5/20 主分类号 G01B5/20
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