| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray detector capable of detecting weak radiation along with position data and capable of enhancing inspection accuracy. SOLUTION: The radiation detector is constituted of an X-ray detection part 15, a first mask 20 having a plurality of hole rows 22 corresponding to an orthogonal modulation pattern to permit the transmission of X-rays, a first slit plate 30 having a first slit opening one hole row among a plurality of the hole rows 22 formed on the first mask 20, a second mask 40 having a plurality of hole rows 42 corresponding to the modulation mode of an orthogonal modulation pattern to permit the transmission of X-rays and a second slit plate 50 having a second slit 52 opening one hole row among a plurality of the hole rows 42 formed on the second mask 40.</p> |
